MTL is a university wide facility for the fabication of microtechnology devices. Major thrust areas include the microectromechanical systems (MEMS) program, high speed compound semiconductor devices, nanoelectronics, optoelectronics, silicon integrated circuits and devices, particle technology, electroceramic thin films, superconductive devices and information storage technology.
The laboratory clean room contains 4000 square feet of class 10 space and 5000 square feet of class 100-1000 space. The laboratory, which is laid out in a bay arrangement, is divided by wall systems made of metal-clad, enamel-coated panels that can be reconfigured to meet changing needs.
The entire clean room area lies on vibration isolation pads anchored directly in bedrock, providing a vibration-free environment for fine-line work. The laboratory is divided into 29 zones in which varying temperatures can be controlled to within one-tenth of one degree Farenheit. Ultra-high purity process gases are distributed throughout the lab using electro-polished, stainless steel delivery systems.
Excellent safety features include centralized smoke, fire and toxic gas monitoring systems, along with a rigorous safety training program and detailed operating procedures to safeguard personnel against potential dangers. In addition, the laboratory is outfitted with automated gas cabinets with remote shut down, automated laboratory shut down and alarm notification, and multiply contained process systems.
The laboratory has a full complement
of process equipment needed to support world-class research in
microelectronic materials growth, processing, and characterization.
See the map of the facility for more details and the equipment page for a detailed description of the available
equipment.
Also, see the MTL homepage for more information.
